MEMS gyroscopes are key angular velocity sensors in inertial navigation, valued for their low cost, small size, and low power consumption. They operate on the Coriolis principle, using electrostatic drive and capacitive sensing, and can be modeled as a mass-spring-damper system. However, their performance is degraded by errors such as frequency split, stiffness coupling, and especially temperature-induced demodulation phase error, which worsens zero-rate output (ZRO).
A team from Beihang University, Zhejiang University, and Nanjing University of Science and Technology proposed a high-precision phase error identification method that requires no extra instruments. By applying electrostatic forces to quadrature correction electrodes, the demodulation phase error can be identified over the full temperature range. Experiments confirmed its consistency and accuracy.
The method, based on quadrature-voltage-induced equivalent angular rate (QIR), was compared with the Coriolis-induced equivalent rate (CIR) approach using four quad-mass gyroscopes (QMGs). Tests across temperatures showed QIR compensation yielded smaller ZRO and better repeatability.
Keys:
- Phase compensation RMSE reduced by 54–86%
- ZRO repeatability improved by 35–95%
- Bias instability by 50–75%
- Angle random walk by 62–69%
Future work aims at self-calibrating, real-time phase error identification.
Link to the thesis:
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